Up to four independent, process-control relays, fully configurable across the measurement range.
When the controller detects a fault, it displays specific error codes or status messages. Error Display Troubleshooting Action Sensor disconnected or failed filament.
) into highly reactive atomic fluorine radicals. These radicals are then directed downstream into deposition (CVD) and etch chambers to clean process build-up without causing the ion bombardment damage associated with in situ RF plasma.
Plug the AC power cord into a properly grounded 120V outlet.
: Uses Low-Field Toroidal plasma technology to dissociate gases like NF3cap N cap F sub 3 mks astron 2l manual
This is where the manual specifications matter most. The Astron 2L uses high-powered 405nm UV LEDs. Because of this intensity, you cannot simply "set it and forget it" like you might with a weaker UV lamp.
Operating an industrial remote plasma generator involves dealing with lethal high voltage, toxic gases, and corrosive byproducts. 1. Corrosive & Hazardous Gases : The dissociation of NF3NF sub 3
Disclaimer: This article is for informational purposes. Always refer to the original manufacturer documentation for specific safety and operational procedures. MKS Instruments is a registered trademark of MKS, Inc.
: Standard operators are restricted from breaking the main vacuum seal or altering internal RF circuits. ) into highly reactive atomic fluorine radicals
Verify cooling water flow rate and temperature.
However, for the most critical applications, always defer to the official documentation and the expertise of MKS Instruments' technical support. If you have access to a physical copy of the manual, please consider sharing it with the community to help fellow engineers and technicians.
The ASTRON 2L is engineered to operate under strict vacuum parameters. Running the device outside of these parameters will result in immediate interlock trips or physical damage. Operational Specification 100% Argon ( ) for plasma strike Process Gas Up to 3.0 slm of NF3NF sub 3 Ignition Pressure 1 to 4 Torr (measured at the ASTRON outlet) Process Pressure 1 to 10 Torr post-ignition Dissociation Rate >94% efficiency under full flow Duty Cycle 100% continuous operation Primary Platforms Applied Materials (AMAT) Producer and AKT systems Critical Safety Protocols
Continue with Argon or Nitrogen purge to clear residual radicals from the plasma generator and lines. Turn off Power: Shut down the microwave power supply. 5. Troubleshooting and Maintenance Common issues often relate to gas flow or water cooling. : Uses Low-Field Toroidal plasma technology to dissociate
efficiently while maintaining low electric fields to prevent reactor wall damage.
The official manual is your go-to source for specifications, setup, operation, and safety. Here’s where to look:
The front panel features a digital display and navigation buttons for system setup. The primary screen displays pressure readings in the user-selected unit (Torr, mbar, or Pascal). Initial Menu Setup To configure the unit upon first power-up: Press the button to enter the setup screen. Select Units and choose between Torr, mbar, or Pa.